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XS Series

  • Specifically designed for the semiconductor market
  • Highspeed inline AXI platform with minimal footprint
  • High oblique angle
  • Radiation filter
  • Microfocus X-ray tube (sealed tube / maintenance-free)
  • Multi-programmable motion system with linear drives
  • Digital CMOS flat panel detector
  • Automatic grayscale and geometry calibration
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Product brochure - XS Series Download PDF →

Leading AXI solution for the semiconductor market

The Matrix XS Series by Nordson, designed for semiconductor applications, is an automatic inspection system tailored for demanding high-speed inspections of semiconductor products on strips (rolls) or in Jedec trays (e.g., overlapping wires or dense wire areas).

The following settings are available:

  • High-resolution setting with 2.5 to 3 μm/pixel resolution
  • Ultra-high-resolution setting with 0.8 μm/pixel resolution

Four technologies in one system

Die AXI-Systemlösungen von Nordson bieten ein modulares Inspektionskonzept.

Das System bietet vier Technologien in einem:

  • Transmission-Röntgenbildgebung (2D) mit patentierter Slice-Filter-Technique (SFT)
  • Off-Axis Technologie (2,5D)
  • 3D SART (Simultaneous Algebraic Reconstruction Technique)

Available configurations

The XS Series is available in the following configurations:

  • XS-2: 2D + SFT
  • XS-2.5: 2D + SFT + Off-Axis (2.5D)
  • XS-3: 2D + SFT + Off-Axis (2.5D) + 3D SART

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